A 0.82 μVrms ultralow 1/f noise bandgap reference for a MEMS gyroscope
In: Microsystems & Nanoengineering, Jg. 9 (2023), Heft 1, S. 1-11
Online
academicJournal
Zugriff:
Abstract High-precision microelectromechanical system (MEMS) gyroscopes are significant in many applications. Bias instability (BI) is an important parameter that indicates the performance of a MEMS gyroscope and is affected by the 1/f noise of the MEMS resonator and readout circuit. Since the bandgap reference (BGR) is an important block in the readout circuit, reducing its 1/f noise is key to improving a gyroscope’s BI. In a traditional BGR, the error amplifier is applied to provide a virtual short-circuit point, but it introduces the main low-frequency noise sources. This paper proposes an ultralow 1/f noise BGR by removing the error amplifier and applying an optimized circuit topology. In addition, a simplified but accurate noise model of the proposed BGR is obtained to optimize the BGR’s output noise performance. To verify this design, the proposed BGR has been implemented in a 180 nm CMOS process with a chip area of 545 × 423 μm. The experimental results show that the BGR’s output integrated noise from 0.1 to 10 Hz is 0.82 μV and the thermal noise is 35 nV/√Hz. Furthermore, bias stability tests of the MEMS gyroscope fabricated in our laboratory with the proposed BGR and some commercial BGRs are carried out. Statistical results show that reducing the BGR’s 1/f noise can nearly linearly improve the gyroscope’s BI.
Titel: |
A 0.82 μVrms ultralow 1/f noise bandgap reference for a MEMS gyroscope
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Autor/in / Beteiligte Person: | Zou, Junjun ; Wei, Qi ; Ju, Chunge ; Liao, Hua ; Gu, Haoyu ; Xing, Bowen ; Zhou, Bin ; Zhang, Rong |
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Zeitschrift: | Microsystems & Nanoengineering, Jg. 9 (2023), Heft 1, S. 1-11 |
Veröffentlichung: | Nature Publishing Group, 2023 |
Medientyp: | academicJournal |
ISSN: | 2055-7434 (print) |
DOI: | 10.1038/s41378-023-00505-3 |
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